Air Clean Technology Solution Reference (1)

The development of clean technology at home and abroad is constantly evolving with the development of science and technology, especially the development of industries such as military industry, aerospace, electronics and biomedicine. Modern industrial products and modern scientific experimental activities require miniaturization, precision, high purity, high quality and high reliability.

To produce these products, it is necessary to achieve an air cleanliness level in the corresponding controlled production environment. For today's electronic information age with "microcomputers" as the means, the importance of high quality and high reliability of products is self-evident. Based on this trend, the development of clean technology has become an indispensable indicator of modern industrial production and scientific experiment activities.

Clean room design (including clean air conditioning design) is an important part of clean technology. The control of factors such as pressure, temperature, humidity, air flow rate and air cleanliness in the clean plant directly affects whether the quality of production is up to standard.

First, clean room pollution control technology program

The main task of air purification is to reduce the granular or chemical molecular pollutants suspended in the clean indoor air to the allowable concentration according to the production process of various products, different processes, and the air cleanliness level of various rooms. .

The pollution sources in the clean room mainly come from four aspects:

1. Dust and bacteria contained in the atmosphere, and cleaned dust particles and microorganisms brought by fresh air in the air conditioning system;

2. The operator dusts;

3. Dust production of building envelopes and facilities, including dust production of walls, ceilings, floors and some exposed pipelines;

4. Dust production in the production process of equipment and products.

In order to ensure the cleanliness of the air required for the clean room of the product environment or other purposes, a variety of comprehensive technical measures are required to meet the requirements. These comprehensive measures include: the use of production processes and equipment that produce less pollutants, or the necessary isolation and negative pressure measures to prevent the spread of pollutants from the production process, and the use of interior decoration materials that produce less dust and are less prone to microbial growth. Appliances; reduce the amount of pollutants brought into the room by personnel and materials; maintain a certain positive pressure in the production environment relative to the outdoor or air cleanliness level, to prevent airborne pollutants from outdoor or adjacent rooms from passing through other doors and windows, Intrusion of holes; strengthen the management of clean rooms, clean and sterilize according to regulations.

In addition to the above various technical measures, in order to control the indoor environment of the clean room in the production environment or other uses to the required air cleanliness level, an important technical measure is to feed a sufficient amount of treated clean air to replace Or dilute the polluted air generated during normal operation in the room. The air purification treatment of the clean room is based on the different cleanliness level requirements of the room, and the different amounts of clean air are sent in different ways, and the corresponding amount of air contaminated with pollutants is discharged at the same time. To maintain the indoor environment at the required level of cleanliness.

At present, the clean and clean method of the clean room is an important and widely used method of air filtration. The clean air sent to the clean room is mainly used to set different performance air filters in various parts of the air supply system to remove suspended particles and microorganisms in the air.

The following is a brief introduction to the relatively novel technical solutions in the field of clean room pollution control:

(1) The traditional spray chamber humid air treatment method is used to treat chemicals in the fresh air. In recent years, many countries have carried out many studies to prove their effectiveness.

(2) A bactericidal HEPA filter (bactericidal enzyme filter) is used. In the past, the toxicity of metal ions was used to sterilize. For example, the silver type yang is higher than the air filter made of exchange fiber. Nowadays, the natural enzyme extracted from the organism can be used to dissolve the cell wall of the bacteria for sterilization purposes, which is a kind of safety. Sterilization measures that prevent secondary contamination from microbial growth on the filter.

(3) Adopting UV photoelectron air purification method. This method is different from ordinary electrostatic filters. The method utilizes the photoelectric effect generated by irradiating ultraviolet rays on the metal film layer, generates electrons and negative ions in the air to charge the contaminated substances flowing therethrough and is trapped by the dust collecting electrode (shown in Fig. 1). It is currently used in a limited range of small spaces.

(4) Use a sea salt particle filter. There is more salt in the air along the coast, and it will be higher under strong wind such as typhoon.

This situation is extremely detrimental to the microelectronics factory. There are two measures now:

1) The filter material used is not easy to precipitate even after a large amount of salt adheres;

2) First set up the water spray section and the water deflector at the inlet section of the air-conditioning box, which can capture 90% of the sea salt particles first, and then remove the uncaptured particles through a common air filter. Spray water should be discharged directly and not recycled. The microelectronics factory set up in Linhai should be considered in the air conditioning purification device.

(5) Adopt intelligent air ion purification system. In recent years, an intelligent purification system has been developed in Europe, which utilizes the high-voltage ionization principle of the ion generating unit to release a stable positive and negative oxygen ion family. The charged oxygen ions react with the VOC substance to achieve the removal of odor purification. The purpose of the air.

In order to ensure the indoor air quality is ideal, the system is also equipped with an intelligent control system, through the wind speed, humidity and air quality sensor on the air duct and the air quality sensor in the return air duct and the new air duct and transmit the detection data to the ionization The controller controls the working intensity of the ion generating unit to automatically control the air quality in the room, and the data can be remotely monitored through the transmitter and the network.

(6) Adopt a new air shower room. After the traditional shower room stops the human body, the dusty air in the small room may be brought into the workshop. The newly improved blowing room has the function of quick self-cleaning. When the blowing air flow is stopped, it can be partially converted into the top. Vertical airflow, so that the dust content in the small indoor air can be quickly reduced to achieve self-cleaning effect.

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